Inventor
BHELLA RICHARD
US3 patents
Patents
3 patentsUS6709568B2Mar 23, 2004
Method for determining concentrations of additives in acid copper electrochemical deposition baths
ADVANCED TECH MATERIALS20 citations79
US7153690B2Dec 26, 2006
Real-time component monitoring and replenishment system for multicomponent fluids
ADVANCED TECH MATERIALS12 citations78
US7157051B2Jan 2, 2007
Sampling management for a process analysis tool to minimize sample usage and decrease sampling time
ADVANCED TECH MATERIALS5 citations55