Inventor
STEVENS JOSEPH J
US17 patents
⚠️ This page may combine multiple inventors who share the name “STEVENS JOSEPH J”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
13 patentsUS6582578B1Jun 24, 2003
Method and associated apparatus for tilting a substrate upon entry for metal deposition
APPLIED MATERIALS INC80 citations97
US6613214B2Sep 2, 2003
Electric contact element for electrochemical deposition system and method
APPLIED MATERIALS INC56 citations96
US6517130B1Feb 11, 2003
Self positioning vacuum chuck
APPLIED MATERIALS INC84 citations96
US6824612B2Nov 30, 2004
Electroless plating system
APPLIED MATERIALS INC67 citations95
US7427338B2Sep 23, 2008
Flow diffuser to be used in electro-chemical plating system
APPLIED MATERIALS INC21 citations92
US6742279B2Jun 1, 2004
Apparatus and method for rinsing substrates
APPLIED MATERIALS INC31 citations92
US6612014B1Sep 2, 2003
Dual post centrifugal wafer clip for spin rinse dry unit
APPLIED MATERIALS INC22 citations92
US6585876B2Jul 1, 2003
Flow diffuser to be used in electro-chemical plating system and method
APPLIED MATERIALS INC35 citations92
US7138014B2Nov 21, 2006
Electroless deposition apparatus
APPLIED MATERIALS INC37 citations91
US6454927B1Sep 24, 2002
Apparatus and method for electro chemical deposition
APPLIED MATERIALS INC28 citations90
US6720263B2Apr 13, 2004
Planarization of metal layers on a semiconductor wafer through non-contact de-plating and control with endpoint detection
APPLIED MATERIALS INC17 citations84
US6432282B1Aug 13, 2002
Method and apparatus for supplying electricity uniformly to a workpiece
APPLIED MATERIALS INC14 citations81
US7005046B2Feb 28, 2006
Apparatus for electro chemical deposition
APPLIED MATERIALS INC2 citations60