Inventor
KACZYNSKI ULRICH
DE15 patents
⚠️ This page may combine multiple inventors who share the name “KACZYNSKI ULRICH”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
LEICA MICROSYSTEMS
13 patentsUS6438856B1Aug 27, 2002
Apparatus for fine positioning of a component, and coordinate measuring machine having an apparatus for fine positioning of a component
LEICA MICROSYSTEMS78 citations95
US6377870B1Apr 23, 2002
Device and method for delivering various transparent substrates into a high-precision measuring instrument
LEICA MICROSYSTEMS31 citations92
US6347458B1Feb 19, 2002
Displaceable X/Y coordinate measurement table
LEICA MICROSYSTEMS51 citations92
US6323953B1Nov 27, 2001
Method and device for measuring structures on a transparent substrate
LEICA MICROSYSTEMS43 citations89
US6960755B2Nov 1, 2005
Contact sensor, and apparatus for protecting a protruding component
LEICA MICROSYSTEMS18 citations83
US7081963B2Jul 25, 2006
Substrate holder, and use of the substrate holder in a highly accurate measuring instrument
LEICA MICROSYSTEMS5 citations73
US6816253B1Nov 9, 2004
Substrate holder, and use of the substrate holder in a highly accurate measuring instrument
LEICA MICROSYSTEMS8 citations73
US6778260B2Aug 17, 2004
Coordinate measuring stage and coordinate measuring instrument
LEICA MICROSYSTEMS9 citations73
US6236503B1May 22, 2001
Microscope stand for a wafer inspection microscope
LEICA MICROSYSTEMS11 citations72
US6919658B2Jul 19, 2005
Coordinate measuring stage
LEICA MICROSYSTEMS5 citations62
US6816263B2Nov 9, 2004
Interferometric measurement apparatus for wavelength calibration
LEICA MICROSYSTEMS4 citations62
US6441899B1Aug 27, 2002
Apparatus and method for loading substrates of various sizes into substrate holders
LEICA MICROSYSTEMS6 citations62
US6441911B1Aug 27, 2002
Measuring instrument and method for measuring patterns on substrates of various thicknesses
LEICA MICROSYSTEMS1 citations51