Inventor
HOLLOWAY KAREN L
US6 patents
Patents
6 patentsUS5243222ASep 7, 1993
Copper alloy metallurgies for VLSI interconnection structures
IBM83 citations95
US5130274AJul 14, 1992
Copper alloy metallurgies for VLSI interconnection structures
IBM97 citations95
US4568632AFeb 4, 1986
Patterning of polyimide films with far ultraviolet light
IBM110 citations94
US6803668B2Oct 12, 2004
Process-robust alignment mark structure for semiconductor wafers
IBM20 citations91
US6461877B1Oct 8, 2002
Variable data compensation for vias or contacts
IBM23 citations90
US8039366B2Oct 18, 2011
Method for providing rotationally symmetric alignment marks for an alignment system that requires asymmetric geometric layout
IBM3 citations56