Inventor

FU YONGHANG

US3 patents

⚠️ This page may combine multiple inventors who share the name “FU YONGHANG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

RUDOLPH TECHNOLOGIES INC

2 patents

US7539583B2May 26, 2009

Method and system for defect detection

RUDOLPH TECHNOLOGIES INC15 citations81

US6813376B1Nov 2, 2004

System and method for detecting defects on a structure-bearing surface using optical inspection

RUDOLPH TECHNOLOGIES INC8 citations70

ISOA INC

1 patent

US6864971B2Mar 8, 2005

System and method for performing optical inspection utilizing diffracted light

ISOA INC13 citations81