Inventor
YAN HAOQUAN
US14 patents
⚠️ This page may combine multiple inventors who share the name “YAN HAOQUAN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
UNIV CALIFORNIA
7 patentsUS7569941B2Aug 4, 2009
Methods of fabricating nanostructures and nanowires and devices fabricated therefrom
UNIV CALIFORNIA77 citations98
US6996147B2Feb 7, 2006
Methods of fabricating nanostructures and nanowires and devices fabricated therefrom
UNIV CALIFORNIA389 citations98
US6882051B2Apr 19, 2005
Nanowires, nanostructures and devices fabricated therefrom
UNIV CALIFORNIA683 citations98
US6882767B2Apr 19, 2005
Nanowire optoelectric switching device and method
UNIV CALIFORNIA55 citations94
US7834264B2Nov 16, 2010
Methods of fabricating nanostructures and nanowires and devices fabricated therefrom
UNIV CALIFORNIA11 citations92
US7569847B2Aug 4, 2009
Methods of fabricating nanostructures and nanowires and devices fabricated therefrom
UNIV CALIFORNIA20 citations92
US7239769B2Jul 3, 2007
Nanowire optoelectric switching device and method
UNIV CALIFORNIA5 citations61
LAM RES CORP
6 patentsUS10658222B2May 19, 2020
Moveable edge coupling ring for edge process control during semiconductor wafer processing
LAM RES CORP7 citations82
US10541168B2Jan 21, 2020
Edge ring centering method using ring dynamic alignment data
LAM RES CORP9 citations82
US11031215B2Jun 8, 2021
Vacuum pump protection against deposition byproduct buildup
LAM RES CORP3 citations69
US11710623B2Jul 25, 2023
Vacuum pump protection against deposition byproduct buildup
LAM RES CORP1 citations68
US12027410B2Jul 2, 2024
Edge ring arrangement with moveable edge rings
LAM RES CORP0 citations61
US12087561B2Sep 10, 2024
Vacuum pump protection against deposition byproduct buildup
LAM RES CORP0 citations59