Inventor
JALLEPALLY RAVI
US8 patents
Patents
8 patentsUS6773507B2Aug 10, 2004
Apparatus and method for fast-cycle atomic layer deposition
APPLIED MATERIALS INC124 citations97
US6450116B1Sep 17, 2002
Apparatus for exposing a substrate to plasma radicals
APPLIED MATERIALS INC114 citations94
US7127367B2Oct 24, 2006
Tailored temperature uniformity
APPLIED MATERIALS INC36 citations90
US6897131B2May 24, 2005
Advances in spike anneal processes for ultra shallow junctions
APPLIED MATERIALS INC45 citations90
US7509035B2Mar 24, 2009
Lamp array for thermal processing exhibiting improved radial uniformity
APPLIED MATERIALS INC37 citations88
US10167553B2Jan 1, 2019
Apparatus and method for providing a uniform flow of gas
APPLIED MATERIALS INC7 citations82
US10519546B2Dec 31, 2019
Apparatus and method for providing a uniform flow of gas
APPLIED MATERIALS INC5 citations71
US7921803B2Apr 12, 2011
Chamber components with increased pyrometry visibility
APPLIED MATERIALS INC5 citations60