Inventor
RAMAMURTHY SUNDAR
US28 patents
⚠️ This page may combine multiple inventors who share the name “RAMAMURTHY SUNDAR”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
19 patentsUS7414224B2Aug 19, 2008
Backside rapid thermal processing of patterned wafers
APPLIED MATERIALS INC16 citations92
US7041931B2May 9, 2006
Stepped reflector plate
APPLIED MATERIALS INC24 citations92
US6888104B1May 3, 2005
Thermally matched support ring for substrate processing chamber
APPLIED MATERIALS INC41 citations92
US7972441B2Jul 5, 2011
Thermal oxidation of silicon using ozone
APPLIED MATERIALS INC22 citations91
US6803546B1Oct 12, 2004
Thermally processing a substrate
APPLIED MATERIALS INC25 citations91
US7127367B2Oct 24, 2006
Tailored temperature uniformity
APPLIED MATERIALS INC36 citations90
US6897131B2May 24, 2005
Advances in spike anneal processes for ultra shallow junctions
APPLIED MATERIALS INC45 citations90
US7509035B2Mar 24, 2009
Lamp array for thermal processing exhibiting improved radial uniformity
APPLIED MATERIALS INC37 citations88
US8888916B2Nov 18, 2014
Thermal reactor with improved gas flow distribution
APPLIED MATERIALS INC6 citations82
US7241345B2Jul 10, 2007
Cylinder for thermal processing chamber
APPLIED MATERIALS INC17 citations81
US9947578B2Apr 17, 2018
Methods for forming low-resistance contacts through integrated process flow systems
APPLIED MATERIALS INC2 citations72
US7986871B2Jul 26, 2011
Processing multilayer semiconductors with multiple heat sources
APPLIED MATERIALS INC2 citations63
US7811877B2Oct 12, 2010
Method of controlling metal silicide formation
APPLIED MATERIALS INC3 citations63
US9114479B2Aug 25, 2015
Managing thermal budget in annealing of substrates
APPLIED MATERIALS INC3 citations62
US7700376B2Apr 20, 2010
Edge temperature compensation in thermal processing particularly useful for SOI wafers
APPLIED MATERIALS INC4 citations56
US9812328B2Nov 7, 2017
Methods for forming low resistivity interconnects
APPLIED MATERIALS INC0 citations52
US9595459B2Mar 14, 2017
Managing thermal budget in annealing of substrates
APPLIED MATERIALS INC0 citations52
US7923660B2Apr 12, 2011
Pulsed laser anneal system architecture
APPLIED MATERIALS INC0 citations52
US10354882B2Jul 16, 2019
Low thermal budget crystallization of amorphous metal silicides
APPLIED MATERIALS INC0 citations47