P

Inventor

HAAS BRIAN

US8 patents
⚠️ This page may combine multiple inventors who share the name “HAAS BRIAN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

APPLIED MATERIALS INC

7 patents
US5960555AOct 5, 1999

Method and apparatus for purging the back side of a substrate during chemical vapor processing

APPLIED MATERIALS INC92 citations97
US7041931B2May 9, 2006

Stepped reflector plate

APPLIED MATERIALS INC24 citations92
US6133152AOct 17, 2000

Co-rotating edge ring extension for use in a semiconductor processing chamber

APPLIED MATERIALS INC43 citations92
US6123766ASep 26, 2000

Method and apparatus for achieving temperature uniformity of a substrate

APPLIED MATERIALS INC37 citations92
US6035100AMar 7, 2000

Reflector cover for a semiconductor processing chamber

APPLIED MATERIALS INC25 citations92
US5920797AJul 6, 1999

Method for gaseous substrate support

APPLIED MATERIALS INC25 citations92
US7127367B2Oct 24, 2006

Tailored temperature uniformity

APPLIED MATERIALS INC36 citations90

TANG SHOUHONG

1 patent
US8068234B2Nov 29, 2011

Method and apparatus for measuring shape or thickness information of a substrate

TANG SHOUHONG15 citations82