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Inventor
FU SENLIN
JP
5 patents
⚠️ This page may combine multiple inventors who share the name “FU SENLIN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SUMCO CORP
2 patents
US7431764B2
Oct 7, 2008
Method for pulling up single crystal
SUMCO CORP
2 citations
60
US7282095B2
Oct 16, 2007
Silicon single crystal pulling method
SUMCO CORP
3 citations
60
MITSUBISHI MATERIAL SILICON
1 patent
US6379460B1
Apr 30, 2002
Thermal shield device and crystal-pulling apparatus using the same
MITSUBISHI MATERIAL SILICON
12 citations
72
ISOGAI HIROMICHI
1 patent
US8476149B2
Jul 2, 2013
Method of manufacturing single crystal silicon wafer from ingot grown by Czocharlski process with rapid heating/cooling process
ISOGAI HIROMICHI
3 citations
54
SUMITOMO MITSUBISHI SILICON
1 patent
US7294203B2
Nov 13, 2007
Heat shielding member of silicon single crystal pulling system
SUMITOMO MITSUBISHI SILICON
1 citations
48