Inventor
MARTIN SVEN
DE7 patents
⚠️ This page may combine multiple inventors who share the name “MARTIN SVEN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ZEISS CARL SMT GMBH
3 patentsUS11112702B2Sep 7, 2021
Device and method for characterizing a microlithographic mask
ZEISS CARL SMT GMBH0 citations61
US11880145B2Jan 23, 2024
Method for measuring a substrate for semiconductor lithography
ZEISS CARL SMT GMBH0 citations55
US11029259B2Jun 8, 2021
Detection device for detecting a structure on an area portion of a lithography mask, and apparatus comprising a detection device of this type
ZEISS CARL SMT GMBH0 citations49