Inventor
UENO NAOHIRO
JP13 patents
⚠️ This page may combine multiple inventors who share the name “UENO NAOHIRO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
NAT INST OF ADVANCED IND SCIEN
8 patentsUS7152482B2Dec 26, 2006
Piezoelectric sensor and input device including same
NAT INST OF ADVANCED IND SCIEN72 citations97
US6936837B2Aug 30, 2005
Film bulk acoustic resonator
NAT INST OF ADVANCED IND SCIEN86 citations97
US7758979B2Jul 20, 2010
Piezoelectric thin film, piezoelectric material, and fabrication method of piezoelectric thin film and piezoelectric material, and piezoelectric resonator, actuator element, and physical sensor using piezoelectric thin film
NAT INST OF ADVANCED IND SCIEN75 citations96
US6536476B2Mar 25, 2003
Flow rate-controlling method and microvalve therefor
NAT INST OF ADVANCED IND SCIEN39 citations92
US7642693B2Jan 5, 2010
Wurtzite thin film, laminate containing wurtzite crystalline layer and their manufacturing methods
NAT INST OF ADVANCED IND SCIEN26 citations90
US7233094B2Jun 19, 2007
Piezoelectric device comprising ultrahighly-oriented aluminum nitride thin film and its manufacturing method
NAT INST OF ADVANCED IND SCIEN13 citations81
US6823739B2Nov 30, 2004
Thin pressure sensor and biological information measuring device using same, and biological information measuring method
NAT INST OF ADVANCED IND SCIEN5 citations61
US7508120B2Mar 24, 2009
Piezoelectric element and method for manufacturing
NAT INST OF ADVANCED IND SCIEN3 citations58