Inventor
PFAFF PAUL L
US12 patents
⚠️ This page may combine multiple inventors who share the name “PFAFF PAUL L”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ATTOFEMTO INC
8 patentsUS7728958B2Jun 1, 2010
Condition assessment method for a structure including a semiconductor material
ATTOFEMTO INC40 citations95
US7420687B2Sep 2, 2008
Condition assessment system for a structure including a semiconductor material
ATTOFEMTO INC32 citations95
US8040521B2Oct 18, 2011
Holographic condition assessment system for a structure including a semiconductor material
ATTOFEMTO INC20 citations92
US9366719B2Jun 14, 2016
Optical to optical methods enhancing the sensitivity and resolution of ultraviolet, electron beam and ion beam devices
ATTOFEMTO INC4 citations83
US7733499B2Jun 8, 2010
Method for optically testing semiconductor devices
ATTOFEMTO INC10 citations83
US9952161B2Apr 24, 2018
Methods for obtaining and analyzing digital interferometric data for computer testing and developing semiconductor and anisotropic devices and materials
ATTOFEMTO INC2 citations72
US9250064B2Feb 2, 2016
Multiple beam transmission interferometric testing methods for the development and evaluation of subwavelength sized features within semiconductor and anisotropic devices
ATTOFEMTO INC4 citations72
US8879071B2Nov 4, 2014
Multiple optical wavelength interferometric testing methods for the development and evaluation of subwavelength sized features within semiconductor devices and materials, wafers, and monitoring all phases of development and manufacture
ATTOFEMTO INC4 citations72
PFAFF PAUL L
4 patentsUS8405823B2Mar 26, 2013
Optical to optical infrared imaging detection system
PFAFF PAUL L68 citations97
US8736823B2May 27, 2014
Methods and processes for optical interferometric or holographic test in the development, evaluation, and manufacture of semiconductor and free-metal devices utilizing anisotropic and isotropic materials
PFAFF PAUL L10 citations91
US8462350B2Jun 11, 2013
Optically enhanced holographic interferometric testing methods for the development and evaluation of semiconductor devices, materials, wafers, and for monitoring all phases of development and manufacture
PFAFF PAUL L14 citations82
US8139228B2Mar 20, 2012
Methods for optically enhanced holographic interferometric testing for test and evaluation of semiconductor devices and materials
PFAFF PAUL L10 citations82