Inventor
SHIMAZU YOSHITOMO
JP6 patents
⚠️ This page may combine multiple inventors who share the name “SHIMAZU YOSHITOMO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SHOWA DENKO KK
4 patentsUS6740589B2May 25, 2004
Composition for polishing semiconductor wafer, semiconductor circuit wafer, and method for producing the same
SHOWA DENKO KK39 citations91
US6547843B2Apr 15, 2003
LSI device polishing composition and method for producing LSI device
SHOWA DENKO KK21 citations91
US6844263B2Jan 18, 2005
LSI device polishing composition and method for producing LSI device
SHOWA DENKO KK7 citations72
US7901474B2Mar 8, 2011
Polishing composition and polishing method
SHOWA DENKO KK0 citations50