Inventor
ZHOU QINGJUN
US28 patents
⚠️ This page may combine multiple inventors who share the name “ZHOU QINGJUN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
16 patentsUS9478433B1Oct 25, 2016
Cyclic spacer etching process with improved profile control
APPLIED MATERIALS INC109 citations97
US9093389B2Jul 28, 2015
Method of patterning a silicon nitride dielectric film
APPLIED MATERIALS INC104 citations97
US8802572B2Aug 12, 2014
Method of patterning a low-k dielectric film
APPLIED MATERIALS INC115 citations97
US8748322B1Jun 10, 2014
Silicon oxide recess etch
APPLIED MATERIALS INC125 citations97
US10204781B1Feb 12, 2019
Methods for bottom up fin structure formation
APPLIED MATERIALS INC6 citations84
US9721807B2Aug 1, 2017
Cyclic spacer etching process with improved profile control
APPLIED MATERIALS INC4 citations72
US7790047B2Sep 7, 2010
Method for removing masking materials with reduced low-k dielectric material damage
APPLIED MATERIALS INC7 citations71
US9818621B2Nov 14, 2017
Cyclic oxide spacer etch process
APPLIED MATERIALS INC2 citations67
US11508618B2Nov 22, 2022
Multicolor self-aligned contact selective etch
APPLIED MATERIALS INC0 citations62
US11302519B2Apr 12, 2022
Method of patterning a low-k dielectric film
APPLIED MATERIALS INC1 citations62
US11094589B2Aug 17, 2021
Multicolor self-aligned contact selective etch
APPLIED MATERIALS INC0 citations62
US10840138B2Nov 17, 2020
Selectively etched self-aligned via processes
APPLIED MATERIALS INC1 citations62
US10741393B2Aug 11, 2020
Methods for bottom up fin structure formation
APPLIED MATERIALS INC0 citations52
US10439047B2Oct 8, 2019
Methods for etch mask and fin structure formation
APPLIED MATERIALS INC0 citations52
US9368370B2Jun 14, 2016
Temperature ramping using gas distribution plate heat
APPLIED MATERIALS INC1 citations51
US10770568B2Sep 8, 2020
Method to remove III-V materials in high aspect ratio structures
APPLIED MATERIALS INC0 citations38
MICROMATERIALS LLC
4 patentsUS10510540B2Dec 17, 2019
Mask scheme for cut pattern flow with enlarged EPE window
MICROMATERIALS LLC11 citations84
US10692728B2Jun 23, 2020
Use of selective aluminum oxide etch
MICROMATERIALS LLC5 citations73
US10593594B2Mar 17, 2020
Selectively etched self-aligned via processes
MICROMATERIALS LLC2 citations73
US10510602B2Dec 17, 2019
Methods of producing self-aligned vias
MICROMATERIALS LLC0 citations41
EYE INSTITUTE OF SHANDONG FIRST MEDICAL UNIV
2 patentsUS11761003B2Sep 19, 2023
Adeno-associated virus for activating RNA-NEAT1 over-expression and applications thereof
EYE INSTITUTE OF SHANDONG FIRST MEDICAL UNIV0 citations52
US12324769B1Jun 10, 2025
Double-network versatile hydrogel with antibacterial and drug sequential release capabilities
EYE INSTITUTE OF SHANDONG FIRST MEDICAL UNIV0 citations31