Inventor
GAO HE
US11 patents
⚠️ This page may combine multiple inventors who share the name “GAO HE”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HGST Netherlands BV
5 patentsUS8623770B1Jan 7, 2014
Method for sidewall spacer line doubling using atomic layer deposition of a titanium oxide
HGST Netherlands BV417 citations96
US9377683B2Jun 28, 2016
Imprint template with optically-detectable alignment marks and method for making using block copolymers
HGST Netherlands BV3 citations72
US9129812B2Sep 8, 2015
Method for directed self-assembly (DSA) of block copolymers
HGST Netherlands BV2 citations62
US9105295B2Aug 11, 2015
Pattern tone reversal
HGST Netherlands BV2 citations60
US9054043B2Jun 9, 2015
Method for directed self-assembly (DSA) of block copolymers
HGST Netherlands BV0 citations51