Inventor
KOSAKAI MAMORU
JP32 patents
⚠️ This page may combine multiple inventors who share the name “KOSAKAI MAMORU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SUMITOMO OSAKA CEMENT CO LTD
22 patentsUS6768079B2Jul 27, 2004
Susceptor with built-in plasma generation electrode and manufacturing method therefor
SUMITOMO OSAKA CEMENT CO LTD158 citations99
US6556414B2Apr 29, 2003
Electrostatic and vacuum chucking holding apparatus
SUMITOMO OSAKA CEMENT CO LTD46 citations92
US10475687B2Nov 12, 2019
Electrostatic chuck device
SUMITOMO OSAKA CEMENT CO LTD7 citations84
US6950297B2Sep 27, 2005
Electrostatic chuck and manufacturing method therefor
SUMITOMO OSAKA CEMENT CO LTD14 citations84
US10256131B2Apr 9, 2019
Electrostatic chuck device
SUMITOMO OSAKA CEMENT CO LTD8 citations83
US7646581B2Jan 12, 2010
Electrostatic chuck
SUMITOMO OSAKA CEMENT CO LTD16 citations83
US6838646B2Jan 4, 2005
Susceptor device
SUMITOMO OSAKA CEMENT CO LTD15 citations82
US10079167B2Sep 18, 2018
Electrostatic chucking device
SUMITOMO OSAKA CEMENT CO LTD4 citations73
US10153192B2Dec 11, 2018
Electrostatic chuck device
SUMITOMO OSAKA CEMENT CO LTD3 citations72
US6872908B2Mar 29, 2005
Susceptor with built-in electrode and manufacturing method therefor
SUMITOMO OSAKA CEMENT CO LTD11 citations72
US11664261B2May 30, 2023
Electrostatic chuck device
SUMITOMO OSAKA CEMENT CO LTD2 citations71
US10923381B2Feb 16, 2021
Electrostatic chuck device
SUMITOMO OSAKA CEMENT CO LTD2 citations71
US10475688B2Nov 12, 2019
Electrostatic chuck device, and semiconductor manufacturing device
SUMITOMO OSAKA CEMENT CO LTD2 citations71
US9209061B2Dec 8, 2015
Electrostatic chuck device
SUMITOMO OSAKA CEMENT CO LTD5 citations71
US6603651B2Aug 5, 2003
Electrostatic chuck
SUMITOMO OSAKA CEMENT CO LTD6 citations63
US9466518B2Oct 11, 2016
Electrostatic chuck device
SUMITOMO OSAKA CEMENT CO LTD2 citations62
US11551962B2Jan 10, 2023
Ceramic substrate and susceptor
SUMITOMO OSAKA CEMENT CO LTD0 citations61
US11887877B2Jan 30, 2024
Electrostatic chuck device
SUMITOMO OSAKA CEMENT CO LTD1 citations60
US6730276B2May 4, 2004
Plastic film electrostatic adsorption apparatus and electrostatic adsorption method
SUMITOMO OSAKA CEMENT CO LTD4 citations56
US6991703B2Jan 31, 2006
Bonding method, bonding stage and electronic component packaging apparatus
SUMITOMO OSAKA CEMENT CO LTD1 citations52
US11107719B2Aug 31, 2021
Electrostatic chuck device and method for manufacturing electrostatic chuck device
SUMITOMO OSAKA CEMENT CO LTD0 citations50
US10622239B2Apr 14, 2020
Electrostatic chuck device
SUMITOMO OSAKA CEMENT CO LTD0 citations41
TOKYO ELECTRON LTD
4 patentsUSD587222SFeb 24, 2009
Attracting plate of an electrostatic chuck for semiconductor manufacturing
TOKYO ELECTRON LTD55 citations98
US7619870B2Nov 17, 2009
Electrostatic chuck
TOKYO ELECTRON LTD24 citations92
US9412635B2Aug 9, 2016
Electrostatic chuck device
TOKYO ELECTRON LTD4 citations72
US9721822B2Aug 1, 2017
Electrostatic chuck apparatus
TOKYO ELECTRON LTD3 citations71