P

Inventor

HIROSE YOSHIRO

JP149 patents
⚠️ This page may combine multiple inventors who share the name “HIROSE YOSHIRO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

HITACHI INT ELECTRIC INC

32 patents
US10026607B2Jul 17, 2018

Substrate processing apparatus for forming film including at least two different elements

HITACHI INT ELECTRIC INC8 citations92
US9312123B2Apr 12, 2016

Method of manufacturing semiconductor device and substrate processing apparatus

HITACHI INT ELECTRIC INC6 citations92
US7884034B2Feb 8, 2011

Method of manufacturing semiconductor device and substrate processing apparatus

HITACHI INT ELECTRIC INC20 citations89
US9865451B2Jan 9, 2018

Cleaning method, method of manufacturing semiconductor device, substrate processing apparatus, and recording medium

HITACHI INT ELECTRIC INC8 citations84
US9613798B2Apr 4, 2017

Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium

HITACHI INT ELECTRIC INC8 citations84
US9508543B2Nov 29, 2016

Method of manufacturing semiconductor device, substrate processing apparatus, and non-transitory computer-readable recording medium

HITACHI INT ELECTRIC INC10 citations84
US9472391B2Oct 18, 2016

Semiconductor device manufacturing method

HITACHI INT ELECTRIC INC11 citations84
US9443718B2Sep 13, 2016

Method of manufacturing semiconductor device, substrate processing apparatus, and non-transitory computer-readable recording medium

HITACHI INT ELECTRIC INC11 citations84
US9384971B2Jul 5, 2016

Method of manufacturing semiconductor device by forming a film on a substrate

HITACHI INT ELECTRIC INC5 citations84
US9385013B2Jul 5, 2016

Method and apparatus of manufacturing a semiconductor device by forming a film on a substrate

HITACHI INT ELECTRIC INC5 citations84
US9384972B2Jul 5, 2016

Method of manufacturing semiconductor device by forming a film on a substrate

HITACHI INT ELECTRIC INC5 citations84
US9384968B2Jul 5, 2016

Method of manufacturing a semiconductor device by forming a film on a substrate

HITACHI INT ELECTRIC INC5 citations84
US9349586B2May 24, 2016

Method of manufacturing semiconductor device, substrate processing apparatus, substrate processing system and non-transitory computer-readable recording medium

HITACHI INT ELECTRIC INC8 citations84
US9330904B2May 3, 2016

Method of manufacturing semiconductor device and substrate processing apparatus

HITACHI INT ELECTRIC INC5 citations84
US9257275B2Feb 9, 2016

Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium

HITACHI INT ELECTRIC INC7 citations84
US9218959B2Dec 22, 2015

Method of manufacturing semiconductor device, method of processing substrate, substrate processing apparatus and non-transitory computer-readable recording medium

HITACHI INT ELECTRIC INC6 citations84
US9190298B2Nov 17, 2015

Film forming method and recording medium for performing the method

HITACHI INT ELECTRIC INC5 citations84
US9093270B2Jul 28, 2015

Method of manufacturing semiconductor device, substrate processing apparatus, and non-transitory computer-readable recording medium

HITACHI INT ELECTRIC INC11 citations84
US9053927B2Jun 9, 2015

Method of manufacturing semiconductor device and method of processing substrate

HITACHI INT ELECTRIC INC11 citations84
US9054046B2Jun 9, 2015

Method of manufacturing semiconductor device and method of processing substrate

HITACHI INT ELECTRIC INC10 citations84
US8809204B2Aug 19, 2014

Method of manufacturing semiconductor device and substrate processing apparatus

HITACHI INT ELECTRIC INC4 citations84
US9620357B2Apr 11, 2017

Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium

HITACHI INT ELECTRIC INC8 citations83
US9384966B2Jul 5, 2016

Method of manufacturing a semiconductor device by forming a film on a substrate

HITACHI INT ELECTRIC INC2 citations74
US9384969B2Jul 5, 2016

Method of manufacturing semiconductor device by forming a film on a substrate

HITACHI INT ELECTRIC INC2 citations74
US9384967B2Jul 5, 2016

Method of manufacturing a semiconductor device by forming a film on a substrate

HITACHI INT ELECTRIC INC2 citations74
US9384970B2Jul 5, 2016

Method of manufacturing semiconductor device by forming a film on a substrate

HITACHI INT ELECTRIC INC2 citations74
US10340134B2Jul 2, 2019

Semiconductor device manufacturing method, substrate processing apparatus, and recording medium

HITACHI INT ELECTRIC INC5 citations73
US10128104B2Nov 13, 2018

Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium

HITACHI INT ELECTRIC INC2 citations73
US9890458B2Feb 13, 2018

Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium

HITACHI INT ELECTRIC INC3 citations73
US9816181B2Nov 14, 2017

Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium

HITACHI INT ELECTRIC INC3 citations73
US9793107B2Oct 17, 2017

Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium

HITACHI INT ELECTRIC INC4 citations73
US9732426B2Aug 15, 2017

Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium

HITACHI INT ELECTRIC INC2 citations73

AKAE NAONORI

4 patents

HITACHI-KOKUSAI ELECTRIC INC

4 patents

HIROSE YOSHIRO

3 patents

HOYA CORP

1 patent

HOWA MACHINERY LTD

1 patent

TAKASAWA YUSHIN

1 patent

SASAJIMA RYOTA

1 patent

OTA YOSUKE

1 patent

HITACHI KOKOSAI ELECTRIC INC

1 patent

KOKUSAI ELECTRIC CORP

1 patent

Showing the top 50 of 149 patents by PatentIndex Score.