Inventor
KIM BYEONG HEE
KR6 patents
⚠️ This page may combine multiple inventors who share the name “KIM BYEONG HEE”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SAMSUNG ELECTRONICS CO LTD
3 patentsUS9564295B2Feb 7, 2017
Diagnosis system for pulsed plasma
SAMSUNG ELECTRONICS CO LTD7 citations82
US11501987B2Nov 15, 2022
Loadlock module and semiconductor manufacturing apparatus including the same
SAMSUNG ELECTRONICS CO LTD3 citations71
US10971382B2Apr 6, 2021
Loadlock module and semiconductor manufacturing apparatus including the same
SAMSUNG ELECTRONICS CO LTD2 citations71