Inventor

OKAZAKI FUMIYA

JP4 patents

⚠️ This page may combine multiple inventors who share the name “OKAZAKI FUMIYA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

EBARA CORP

2 patents

US12094731B2Sep 17, 2024

Substrate drying apparatus

EBARA CORP0 citations49

US12394609B2Aug 19, 2025

Product removal apparatus, treatment system, and product removal method

EBARA CORP0 citations42

SCREEN SEMICONDUCTOR SOLUTIONS CO LTD

1 patent

US10960426B2Mar 30, 2021

Development processing device

SCREEN SEMICONDUCTOR SOLUTIONS CO LTD0 citations59

SUGIYAMA MINORU

1 patent

US9927760B2Mar 27, 2018

Development processing device

SUGIYAMA MINORU0 citations48