Inventor
KLEIN DANA
IL11 patents
⚠️ This page may combine multiple inventors who share the name “KLEIN DANA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
KLA TENCOR CORP
6 patentsUS9329033B2May 3, 2016
Method for estimating and correcting misregistration target inaccuracy
KLA TENCOR CORP8 citations82
US10203200B2Feb 12, 2019
Analyzing root causes of process variation in scatterometry metrology
KLA TENCOR CORP7 citations81
US10901325B2Jan 26, 2021
Determining the impacts of stochastic behavior on overlay metrology data
KLA TENCOR CORP4 citations71
US9903711B2Feb 27, 2018
Feed forward of metrology data in a metrology system
KLA TENCOR CORP5 citations71
US10754260B2Aug 25, 2020
Method and system for process control with flexible sampling
KLA TENCOR CORP3 citations68
US10025756B2Jul 17, 2018
Selection and use of representative target subsets
KLA TENCOR CORP0 citations30
KLA CORP
3 patentsUS11333982B2May 17, 2022
Scaling metric for quantifying metrology sensitivity to process variation
KLA CORP2 citations67
US11249400B2Feb 15, 2022
Per-site residuals analysis for accurate metrology measurements
KLA CORP1 citations59
US11725934B2Aug 15, 2023
Systems and methods for metrology optimization based on metrology landscapes
KLA CORP0 citations46