Inventor
QUEENS RENE MARINUS GERARDUS JOHAN
US8 patents
Patents
8 patentsUS7646471B2Jan 12, 2010
Lithographic apparatus, level sensor, method of inspection, device manufacturing method, and device manufactured thereby
ASML NETHERLANDS BV246 citations94
US10558130B2Feb 11, 2020
Methods for controlling lithographic apparatus, lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV4 citations70
US10274849B2Apr 30, 2019
Methods for controlling lithographic apparatus, lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV5 citations70
US11249404B2Feb 15, 2022
System and method for measurement of alignment
ASML NETHERLANDS BV2 citations68
US10684557B2Jun 16, 2020
Method for adjusting actuation of a lithographic apparatus
ASML NETHERLANDS BV1 citations60
US10503087B2Dec 10, 2019
Methods for controlling lithographic apparatus, lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV1 citations50
US11150565B2Oct 19, 2021
Methods for controlling lithographic apparatus, lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV0 citations48
US10845719B2Nov 24, 2020
Methods for controlling lithographic apparatus, lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV0 citations47