Inventor
KOOP ERIK JOHAN
NL7 patents
⚠️ This page may combine multiple inventors who share the name “KOOP ERIK JOHAN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML NETHERLANDS BV
6 patentsUS9488465B2Nov 8, 2016
Level sensor, a method for determining a height map of a substrate using a selected resolution, and a lithographic apparatus
ASML NETHERLANDS BV8 citations80
US10558130B2Feb 11, 2020
Methods for controlling lithographic apparatus, lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV4 citations70
US10274849B2Apr 30, 2019
Methods for controlling lithographic apparatus, lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV5 citations70
US11099489B2Aug 24, 2021
Method of measuring a parameter of a lithographic process, metrology apparatus
ASML NETHERLANDS BV0 citations61
US11137695B2Oct 5, 2021
Method of determining a height profile, a measurement system and a computer readable medium
ASML NETHERLANDS BV1 citations58
US10474043B2Nov 12, 2019
Method of measuring a property of a substrate, inspection apparatus, lithographic system and device manufacturing method
ASML NETHERLANDS BV0 citations39