Inventor
VAN DEN BRINK MARINUS AART
NL17 patents
⚠️ This page may combine multiple inventors who share the name “VAN DEN BRINK MARINUS AART”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML NETHERLANDS BV
13 patentsUS7589818B2Sep 15, 2009
Lithographic apparatus, alignment apparatus, device manufacturing method, and a method of converting an apparatus
ASML NETHERLANDS BV66 citations98
US7161659B2Jan 9, 2007
Dual stage lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV271 citations98
US11544440B2Jan 3, 2023
Machine learning based inverse optical proximity correction and process model calibration
ASML NETHERLANDS BV6 citations85
US7046331B2May 16, 2006
Lithographic apparatus, device manufacturing method, and device manufactured thereby
ASML NETHERLANDS BV15 citations80
US12093632B2Sep 17, 2024
Machine learning based inverse optical proximity correction and process model calibration
ASML NETHERLANDS BV2 citations73
USRE45576EJun 23, 2015
Dual stage lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV1 citations62
US12500063B2Dec 16, 2025
Method and apparatus for inspection
ASML NETHERLANDS BV0 citations61
US11875966B2Jan 16, 2024
Method and apparatus for inspection
ASML NETHERLANDS BV0 citations61
US11094502B2Aug 17, 2021
Method and apparatus for inspection
ASML NETHERLANDS BV0 citations61
USRE47943EApr 14, 2020
Dual stage lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV0 citations52
USRE46933EJul 3, 2018
Dual stage lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV0 citations52
US12099306B2Sep 24, 2024
Method for controlling a lithographic system
ASML NETHERLANDS BV0 citations51
US10268128B2Apr 23, 2019
Lithographic apparatus
ASML NETHERLANDS BV0 citations32
VAN DEN BRINK MARINUS AART
3 patentsUSRE44446EAug 20, 2013
Dual stage lithographic apparatus and device manufacturing method
VAN DEN BRINK MARINUS AART6 citations82
USRE43576EAug 14, 2012
Dual stage lithographic apparatus and device manufacturing method
VAN DEN BRINK MARINUS AART10 citations82
US8248583B2Aug 21, 2012
Lithographic apparatus and calibration method
VAN DEN BRINK MARINUS AART1 citations48