Inventor
AWATA HIDEAKI
JP13 patents
⚠️ This page may combine multiple inventors who share the name “AWATA HIDEAKI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SUMITOMO ELECTRIC INDUSTRIES
11 patentsUS7871667B2Jan 18, 2011
Method of operating vacuum deposition apparatus and vacuum deposition apparatus
SUMITOMO ELECTRIC INDUSTRIES7 citations81
US10655213B2May 19, 2020
Oxide sintered material, method of producing oxide sintered material, sputtering target, and method of producing semiconductor device
SUMITOMO ELECTRIC INDUSTRIES2 citations71
US10475631B2Nov 12, 2019
Oxide sintered body and method for manufacturing the same, sputtering target, and semiconductor device
SUMITOMO ELECTRIC INDUSTRIES3 citations71
US10087517B2Oct 2, 2018
Oxide sintered body and semiconductor device
SUMITOMO ELECTRIC INDUSTRIES4 citations71
US10894744B2Jan 19, 2021
Oxide sintered material and method for manufacturing the same, sputtering target, and method for manufacturing semiconductor device
SUMITOMO ELECTRIC INDUSTRIES0 citations57
US11492694B2Nov 8, 2022
Oxide sintered material, method of producing oxide sintered material, sputtering target, and method of producing semiconductor device
SUMITOMO ELECTRIC INDUSTRIES0 citations50
US11024744B2Jun 1, 2021
Semiconductor device and method for manufacturing the same
SUMITOMO ELECTRIC INDUSTRIES0 citations50
US10822276B2Nov 3, 2020
Oxide sintered material and method of manufacturing the same, sputtering target, and method of manufacturing semiconductor device
SUMITOMO ELECTRIC INDUSTRIES0 citations50
US10811238B2Oct 20, 2020
Oxide sintered body and method for manufacturing the same, sputtering target, and semiconductor device
SUMITOMO ELECTRIC INDUSTRIES0 citations50
US10192994B2Jan 29, 2019
Oxide semiconductor film including indium, tungsten and zinc and thin film transistor device
SUMITOMO ELECTRIC INDUSTRIES0 citations50
US7946247B2May 24, 2011
Coating layer thickness measurement mechanism and coating layer forming apparatus using the same
SUMITOMO ELECTRIC INDUSTRIES1 citations49