Inventor
WILLIAMSON DAVID M
US36 patents
⚠️ This page may combine multiple inventors who share the name “WILLIAMSON DAVID M”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
NIKON CORP
23 patentsUS7362508B2Apr 22, 2008
Projection optical system and method for photolithography and exposure apparatus and method using same
NIKON CORP46 citations96
US7701640B2Apr 20, 2010
Projection optical system and method for photolithography and exposure apparatus and method using same
NIKON CORP8 citations84
US11934105B2Mar 19, 2024
Optical objective for operation in EUV spectral region
NIKON CORP2 citations73
US11717161B2Aug 8, 2023
Wide-angle pupil relay for cellphone-based fundus camera
NIKON CORP2 citations73
US10359618B2Jul 23, 2019
Multispectral stereoscopic endoscope system and use of same
NIKON CORP4 citations71
US12156698B2Dec 3, 2024
Wide-angle pupil relay for cellphone-based fundus camera
NIKON CORP0 citations62
US11300884B2Apr 12, 2022
Illumination system with curved 1d-patterned mask for use in EUV-exposure tool
NIKON CORP1 citations62
US11099483B2Aug 24, 2021
Euv lithography system for dense line patterning
NIKON CORP1 citations62
US11054745B2Jul 6, 2021
Illumination system with flat 1D-patterned mask for use in EUV-exposure tool
NIKON CORP0 citations62
US10890849B2Jan 12, 2021
EUV lithography system for dense line patterning
NIKON CORP1 citations62
US10747117B2Aug 18, 2020
Extreme ultraviolet lithography system that utilizes pattern stitching
NIKON CORP1 citations62
US10295911B2May 21, 2019
Extreme ultraviolet lithography system that utilizes pattern stitching
NIKON CORP1 citations62
US12383133B2Aug 12, 2025
Optical system for convertible imaging of posterior and anterior portions of the eye
NIKON CORP0 citations52
US11317798B2May 3, 2022
Catadioptric unit-magnification afocal pupil relay and optical imaging system employing the same
NIKON CORP0 citations52
US10488638B2Nov 26, 2019
Catadioptric imaging systems for digital scanner
NIKON CORP0 citations52
US10386626B2Aug 20, 2019
Non-telecentric multispectral stereoscopic endoscope objective
NIKON CORP0 citations52
US10139610B2Nov 27, 2018
Broadband catadioptric microscope objective with small central obscuration
NIKON CORP1 citations52
US9703085B2Jul 11, 2017
Catadioptric imaging systems for digital scanner
NIKON CORP0 citations52
US9335159B2May 10, 2016
Methods and devices for reducing errors in Goos-Hänchen corrections of displacement data
NIKON CORP0 citations52
US8842296B2Sep 23, 2014
Methods and devices for reducing errors in Goos-Hänchen corrections of displacement data
NIKON CORP1 citations52
US7612892B2Nov 3, 2009
Imaging optical system configured with through the lens optics for producing control information
NIKON CORP1 citations52
US12059210B2Aug 13, 2024
Ophthalmic optical system, ophthalmic objective lens, and ophthalmic device
NIKON CORP0 citations48
US9638906B2May 2, 2017
Catadioptric imaging systems for digital scanner
NIKON CORP0 citations42
SVG LITHOGRAPHY SYSTEMS INC
5 patentsUS5815310ASep 29, 1998
High numerical aperture ring field optical reduction system
SVG LITHOGRAPHY SYSTEMS INC238 citations99
US5537260AJul 16, 1996
Catadioptric optical reduction system with high numerical aperture
SVG LITHOGRAPHY SYSTEMS INC168 citations99
US5956192ASep 21, 1999
Four mirror EUV projection optics
SVG LITHOGRAPHY SYSTEMS INC76 citations96
US6486940B1Nov 26, 2002
High numerical aperture catadioptric lens
SVG LITHOGRAPHY SYSTEMS INC23 citations92
US5966216AOct 12, 1999
On-axix mask and wafer alignment system
SVG LITHOGRAPHY SYSTEMS INC32 citations92
WILLIAMSON DAVID M
4 patentsUS4953960ASep 4, 1990
Optical reduction system
WILLIAMSON DAVID M113 citations95
US8705170B2Apr 22, 2014
High NA catadioptric imaging optics for imaging A reticle to a pair of imaging locations
WILLIAMSON DAVID M15 citations83
US8317344B2Nov 27, 2012
High NA annular field catoptric projection optics using Zernike polynomial mirror surfaces
WILLIAMSON DAVID M0 citations51
US8305559B2Nov 6, 2012
Exposure apparatus that utilizes multiple masks
WILLIAMSON DAVID M0 citations40