Inventor

GAO LISHENG

CN59 patents

⚠️ This page may combine multiple inventors who share the name “GAO LISHENG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

GAO LISHENG

KLA TENCOR CORP

Detecting defects on a wafer

Optical die to database inspection

Detecting defects on a wafer using defect-specific and multi-channel information

Image based specimen process control

Apparatus and methods for finding a best aperture and mode to enhance defect detection

Detecting defects on a wafer using defect-specific and multi-channel information

Defect detection and classification based on attributes determined from a standard reference image

Systems and methods for detecting defects on a wafer

Tuning wafer inspection recipes using precise defect locations

High sensitivity repeater defect detection

Wafer inspection using free-form care areas

Based sampling and binning for yield critical defects

Detecting defects on a wafer using defect-specific information

Alignment of inspection to design using built in targets

Optical die to database inspection

Detecting defects on a wafer using defect-specific and multi-channel information

Wafer inspection using difference images

Method and system for correlating optical images with scanning electron microscopy images

Generating high resolution images from low resolution images for semiconductor applications

Systems and methods for detecting defects on a wafer

Visual feedback for inspection algorithms and filters

Method and system for correlating optical images with scanning electron microscopy images

Adaptive local threshold and color filtering

Defect detection using structural information

Context-based inspection for dark field inspection

Adaptive local threshold and color filtering

Detecting defects on wafers based on 2D scatter plots of values determined for output generated using different optics modes

Dynamic care areas for defect detection

Intra-die defect detection

Sub-pixel alignment of inspection to design

Repeater defect detection

Methods and systems for monitoring a non-defect related characteristic of a patterned wafer

Repeater defect detection

Wafer and reticle inspection systems and methods for selecting illumination pupil configurations

Wafer and reticle inspection systems and methods for selecting illumination pupil configurations

Apparatus and methods for finding a best aperture and mode to enhance defect detection

Scratch filter for wafer inspection

KLA TENCOR TECH CORP

Computer-implemented methods for detecting and/or sorting defects in a design pattern of a reticle

Automatic supervised classifier setup tool for semiconductor defects

Flexible hybrid defect classification for semiconductor manufacturing

CHEN LU

Systems and methods for detecting defects on a wafer

Systems and methods for detecting defects on a wafer

HUANG JUNQING

Detecting defects on a wafer

WU KENONG

Computer-implemented methods for detecting and/or sorting defects in a design pattern of a reticle

LEE CHRIS

Selecting one or more parameters for inspection of a wafer

TEH CHO HUAK

Computer-implemented methods and systems for classifying defects on a specimen

KLA—TENCOR CORP

Previous layer nuisance reduction through oblique illumination

GAO LISHENG

Region based virtual fourier filter

PAN JILUAN

Control method and system for a trackless autonomous crawling all-position arc welding robot with wheels and permanent magnet caterpillar belts

GAO YONG

Adaptive signature detection