Inventor
GU YOUFAN
CN26 patents
⚠️ This page may combine multiple inventors who share the name “GU YOUFAN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
MKS INSTR INC
20 patentsUS5827370AOct 27, 1998
Method and apparatus for reducing build-up of material on inner surface of tube downstream from a reaction furnace
MKS INSTR INC138 citations98
US6197119B1Mar 6, 2001
Method and apparatus for controlling polymerized teos build-up in vacuum pump lines
MKS INSTR INC109 citations97
US6238514B1May 29, 2001
Apparatus and method for removing condensable aluminum vapor from aluminum etch effluent
MKS INSTR INC51 citations96
US7932480B2Apr 26, 2011
Multiple heater control system with expandable modular functionality
MKS INSTR INC54 citations94
US5820641AOct 13, 1998
Fluid cooled trap
MKS INSTR INC147 citations93
US6488745B2Dec 3, 2002
Trap apparatus and method for condensable by-products of deposition reactions
MKS INSTR INC51 citations92
US6361607B2Mar 26, 2002
Apparatus for controlling polymerized teos build-up in vacuum pump lines
MKS INSTR INC25 citations92
US7962294B2Jun 14, 2011
Integrated absolute and differential pressure transducer
MKS INSTR INC15 citations91
US6909975B2Jun 21, 2005
Integrated absolute and differential pressure transducer
MKS INSTR INC22 citations91
US6672171B2Jan 6, 2004
Combination differential and absolute pressure transducer for load lock control
MKS INSTR INC37 citations90
US6562109B2May 13, 2003
Acceleration assisted particle/gas separation system
MKS INSTR INC22 citations90
US9314824B2Apr 19, 2016
Powder and deposition control in throttle valves
MKS INSTR INC20 citations89
US7871587B2Jan 18, 2011
Reactive chemical containment system
MKS INSTR INC7 citations83
US7477996B2Jan 13, 2009
Integrated absolute and differential pressure transducer
MKS INSTR INC10 citations82
US9206919B2Dec 8, 2015
Corrosion and deposition protected valve apparatus and method
MKS INSTR INC12 citations79
US7076920B2Jul 18, 2006
Method of using a combination differential and absolute pressure transducer for controlling a load lock
MKS INSTR INC14 citations79
US7455720B2Nov 25, 2008
Method and apparatus for preventing products of TiCL4 and NH3 or other feed gas reactions from damaging vacuum pumps in TiN or other deposition systems
MKS INSTR INC7 citations74
US6790258B2Sep 14, 2004
Method for removing condensable aluminum chloride vapor from aluminum etch effluent
MKS INSTR INC7 citations74
US6895178B2May 17, 2005
Vapor delivery system
MKS INSTR INC5 citations57
US9200711B2Dec 1, 2015
Method of two-stage flow control
MKS INSTR INC0 citations50
GU YOUFAN
4 patentsUS8172197B2May 8, 2012
Fast-acting pneumatic diaphragm valve
GU YOUFAN28 citations85
US8671987B2Mar 18, 2014
Two-stage, slow-start valve apparatus
GU YOUFAN7 citations81
US8541716B2Sep 24, 2013
Heater control with high-limit thermal safety shutdown
GU YOUFAN9 citations79
US8679287B2Mar 25, 2014
Method and apparatus for preventing ALD reactants from damaging vacuum pumps
GU YOUFAN0 citations39