Inventor
CHEN ANTHONY
US18 patents
⚠️ This page may combine multiple inventors who share the name “CHEN ANTHONY”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
LAM RES CORP
4 patentsUS7138067B2Nov 21, 2006
Methods and apparatus for tuning a set of plasma processing steps
LAM RES CORP41 citations92
US6777173B2Aug 17, 2004
H2O vapor as a processing gas for crust, resist, and residue removal for post ion implant resist strip
LAM RES CORP18 citations80
US6770214B2Aug 3, 2004
Method of reducing aluminum fluoride deposits in plasma etch reactor
LAM RES CORP7 citations71
US7578945B2Aug 25, 2009
Method and apparatus for tuning a set of plasma processing steps
LAM RES CORP3 citations63
ECHOPIXEL INC
4 patentsUS9384528B2Jul 5, 2016
Image annotation using a haptic plane
ECHOPIXEL INC11 citations81
US10755378B2Aug 25, 2020
Multi-point annotation using a haptic plane
ECHOPIXEL INC2 citations70
US10078885B2Sep 18, 2018
Image annotation using a haptic plane
ECHOPIXEL INC4 citations70
US10755379B2Aug 25, 2020
Multi-point annotation using a haptic plane
ECHOPIXEL INC0 citations38