Inventor
TOMIOKA Kyouhei
JP5 patents
Patents
5 patentsUS10840141B2Nov 17, 2020
Workpiece-separating device and workpiece-separating method
SHIN ETSU ENG CO LTD1 citations54
US11654513B2May 23, 2023
Workpiece-separating device and workpiece-separating method
SHIN ETSU ENG CO LTD0 citations43
US11633810B2Apr 25, 2023
Workpiece-separating device and workpiece-separating method
SHIN ETSU ENG CO LTD0 citations43
US11251058B1Feb 15, 2022
Workpiece-separating device and workpiece-separating method
SHIN ETSU ENG CO LTD0 citations43
US11322384B2May 3, 2022
Substrate processing apparatus and substrate processing method
SHIN ETSU ENG CO LTD0 citations42