Inventor
OHTANI YOSHIKAZU
JP6 patents
⚠️ This page may combine multiple inventors who share the name “OHTANI YOSHIKAZU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SHIN ETSU ENG CO LTD
5 patentsUS10840141B2Nov 17, 2020
Workpiece-separating device and workpiece-separating method
SHIN ETSU ENG CO LTD1 citations54
US11654513B2May 23, 2023
Workpiece-separating device and workpiece-separating method
SHIN ETSU ENG CO LTD0 citations43
US11633810B2Apr 25, 2023
Workpiece-separating device and workpiece-separating method
SHIN ETSU ENG CO LTD0 citations43
US11251058B1Feb 15, 2022
Workpiece-separating device and workpiece-separating method
SHIN ETSU ENG CO LTD0 citations43
US11322384B2May 3, 2022
Substrate processing apparatus and substrate processing method
SHIN ETSU ENG CO LTD0 citations42