Inventor
GIRAL LOUIS
FR10 patents
⚠️ This page may combine multiple inventors who share the name “GIRAL LOUIS”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
COMMISSARIAT ENERGIE ATOMIQUE
2 patentsUS4770977ASep 13, 1988
Silicon-containing polymer and its use as a masking resin in a lithography process
COMMISSARIAT ENERGIE ATOMIQUE28 citations90
US4689288AAug 25, 1987
Photosensitive film based on silicon-containing polymer and its use as a masking resin in a lithography process
COMMISSARIAT ENERGIE ATOMIQUE27 citations90