Inventor
CHANG YUAN-YAO
TW12 patents
⚠️ This page may combine multiple inventors who share the name “CHANG YUAN-YAO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TAIWAN SEMICONDUCTOR MFG CO LTD
11 patentsUS10510623B2Dec 17, 2019
Overlay error and process window metrology
TAIWAN SEMICONDUCTOR MFG CO LTD3 citations70
US10605855B2Mar 31, 2020
Method, test line and system for detecting semiconductor wafer defects
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations65
US12417992B2Sep 16, 2025
Chip structure with conductive pillar and method for forming the same
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations60
US11688708B2Jun 27, 2023
Chip structure and method for forming the same
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations60
US12159809B2Dec 3, 2024
System and method for measuring device inside through-silicon via surroundings
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations59
US11955392B2Apr 9, 2024
System and method for measuring device inside through-silicon via surroundings
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations59
US12007431B2Jun 11, 2024
Test circuit and method for operating the same
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations57
US11927628B2Mar 12, 2024
Benchmark circuit on a semiconductor wafer and method for operating the same
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations51
US10879135B2Dec 29, 2020
Overlay error and process window metrology
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations49
US9995770B2Jun 12, 2018
Multidirectional semiconductor arrangement testing
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations47
US11754614B2Sep 12, 2023
Semiconductor device and analyzing method thereof
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations44