Inventor
CHU SCHUBERT
US13 patents
Patents
13 patentsUS11152221B2Oct 19, 2021
Methods and apparatus for metal silicide deposition
APPLIED MATERIALS INC2 citations73
US11124874B2Sep 21, 2021
Methods for depositing metallic iridium and iridium silicide
APPLIED MATERIALS INC2 citations72
US11946135B2Apr 2, 2024
Low temperature deposition of iridium containing films
APPLIED MATERIALS INC0 citations62
US11643721B2May 9, 2023
Low temperature deposition of iridium containing films
APPLIED MATERIALS INC0 citations62
US11615986B2Mar 28, 2023
Methods and apparatus for metal silicide deposition
APPLIED MATERIALS INC0 citations62
US11021790B2Jun 1, 2021
Liner for processing chamber
APPLIED MATERIALS INC0 citations62
US9011973B2Apr 21, 2015
Methods for depositing oxygen deficient metal films
APPLIED MATERIALS INC2 citations62
US12371776B2Jul 29, 2025
Overlap susceptor and preheat ring
APPLIED MATERIALS INC0 citations61
US11781212B2Oct 10, 2023
Overlap susceptor and preheat ring
APPLIED MATERIALS INC0 citations61
US12338547B2Jun 24, 2025
Method for forming silicon-phosphorous materials
APPLIED MATERIALS INC0 citations60
US11649560B2May 16, 2023
Method for forming silicon-phosphorous materials
APPLIED MATERIALS INC0 citations60
US12015042B2Jun 18, 2024
Structure and material engineering methods for optoelectronic devices signal to noise ratio enhancement
APPLIED MATERIALS INC0 citations57
US11189508B2Nov 30, 2021
Purged viewport for quartz dome in epitaxy reactor
APPLIED MATERIALS INC1 citations56