Inventor
SHAH KARTIK BHUPENDRA
US9 patents
Patents
9 patentsUSD959490SAug 2, 2022
Display screen or portion thereof with graphical user interface
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US12371776B2Jul 29, 2025
Overlap susceptor and preheat ring
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US12060651B2Aug 13, 2024
Chamber architecture for epitaxial deposition and advanced epitaxial film applications
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US11781212B2Oct 10, 2023
Overlap susceptor and preheat ring
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US12091749B2Sep 17, 2024
Method for epitaxially depositing a material on a substrate by flowing a process gas across the substrate from an upper gas inlet to an upper gas outlet and flowing a purge gas from a lower gas inlet to a lower gas outlet
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US12018372B2Jun 25, 2024
Gas injector for epitaxy and CVD chamber
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US12593643B2Mar 31, 2026
Batch thermal process chamber
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US12324061B2Jun 3, 2025
Epitaxial deposition chamber
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US12183559B2Dec 31, 2024
Apparatus for temperature control in a substrate processing chamber
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