P

Inventor

OKAMURA NAOYUKI

JP11 patents
⚠️ This page may combine multiple inventors who share the name “OKAMURA NAOYUKI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

TOKYO ELECTRON LTD

5 patents
US11923220B2Mar 5, 2024

Substrate processing apparatus

TOKYO ELECTRON LTD2 citations70
US8002894B2Aug 23, 2011

Processing apparatus and processing method

TOKYO ELECTRON LTD3 citations59
US10256163B2Apr 9, 2019

Method of treating a microelectronic substrate using dilute TMAH

TOKYO ELECTRON LTD0 citations50
US9224624B2Dec 29, 2015

Liquid processing method

TOKYO ELECTRON LTD0 citations48
US9627192B2Apr 18, 2017

Substrate processing method, substrate processing apparatus, and computer-readable storage medium stored with substrate processing program

TOKYO ELECTRON LTD0 citations36

TOSHIBA KK

3 patents
US9488051B2Nov 8, 2016

Axially balancing a turbine using low temperature exhaust

TOSHIBA KK3 citations71
US9598969B2Mar 21, 2017

Turbine, manufacturing method thereof, and power generating system

TOSHIBA KK3 citations70
US9399949B2Jul 26, 2016

Turbine

TOSHIBA KK0 citations39

MINAMI TERUOMI

2 patents
US8906165B2Dec 9, 2014

Substrate processing method, storage medium storing computer program for performing substrate processing method, and substrate processing apparatus

MINAMI TERUOMI0 citations37
US8545640B2Oct 1, 2013

Substrate processing method, storage medium storing computer program for performing substrate processing method, and substrate processing apparatus

MINAMI TERUOMI0 citations37

INADA TAKAO

1 patent
US8951359B2Feb 10, 2015

Liquid processing apparatus, liquid processing method and computer-readable storage medium storing liquid processing program

INADA TAKAO4 citations64