P

Inventor

MARUYAMA HIROTAKA

JP10 patents
⚠️ This page may combine multiple inventors who share the name “MARUYAMA HIROTAKA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

TOKYO ELECTRON LTD

5 patents
US10037901B2Jul 31, 2018

Substrate liquid treatment apparatus, method of cleaning substrate liquid treatment apparatus and non-transitory storage medium

TOKYO ELECTRON LTD5 citations71
US11923220B2Mar 5, 2024

Substrate processing apparatus

TOKYO ELECTRON LTD2 citations70
US10067514B2Sep 4, 2018

Substrate processing apparatus and liquid mixing method

TOKYO ELECTRON LTD4 citations69
US10192731B2Jan 29, 2019

Liquid processing method, substrate processing apparatus, and storage medium

TOKYO ELECTRON LTD0 citations49
US9108228B2Aug 18, 2015

Liquid processing apparatus having switchable nozzles

TOKYO ELECTRON LTD0 citations39

MINAMI TERUOMI

2 patents
US8308870B2Nov 13, 2012

Cleaning apparatus, cleaning method and recording medium

MINAMI TERUOMI0 citations38
US8906165B2Dec 9, 2014

Substrate processing method, storage medium storing computer program for performing substrate processing method, and substrate processing apparatus

MINAMI TERUOMI0 citations37

SNOW BRAND MILK PRODUCTS CO LTD

1 patent
US4401657AAug 30, 1983

Nutrient composition suitable for enteral feeding

SNOW BRAND MILK PRODUCTS CO LTD28 citations86

SONY CORP

1 patent
US9362106B2Jun 7, 2016

Substrate processing method, substrate processing apparatus, and storage medium

SONY CORP4 citations70

TANAKA SATORU

1 patent
US8978671B2Mar 17, 2015

Substrate processing method and substrate processing apparatus

TANAKA SATORU1 citations51