Inventor

GOORDEN SEBASTIANUS ADRIANUS

NL36 patents

⚠️ This page may combine multiple inventors who share the name “GOORDEN SEBASTIANUS ADRIANUS”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

GOORDEN SEBASTIANUS ADRIANUS

ASML NETHERLANDS BV

Metrology sensor for position metrology

Apparatus and method for measuring a position of a mark

Dark field microscope

Metrology method and lithographic apparatuses

Metrology sensor, lithographic apparatus and method for manufacturing devices

Metrology apparatus, lithographic system, and method of measuring a structure

Position sensing arrangement and lithographic apparatus including such an arrangement, position sensing method and device manufacturing method

Substrate comprising a target arrangement, and associated at least one patterning device, lithographic method and metrology method

Metrology method and associated metrology and lithographic apparatuses

Alignment sensor apparatus for process sensitivity compensation

Alignment measurement system

Method and apparatus for measuring a structure on a substrate

Metrology sensor, lithographic apparatus and method for manufacturing devices

Radiation conditioning system, illumination system and metrology apparatus, device manufacturing method

Enhanced alignment for a photolithographic apparatus

Dark field microscope

Metrology system and lithographic system

Apparatus and methods for determining the position of a target structure on a substrate

Alignment method and apparatus

Position sensor

Sensor, lithographic apparatus, and device manufacturing method

Alignment measurement system

Methods and apparatuses for measurement of a parameter of a feature fabricated on a substrate

Device and method for processing a radiation beam with coherence

Metrology sensor, illumination system and method of generating measurement illumination with a configurable illumination spot diameter

Metrology sensor, lithographic apparatus and method for manufacturing devices

Lithographic apparatus, metrology systems, and methods thereof

Alignment method

Micromirror arrays

Micromirror arrays

Lithographic apparatus, multi-wavelength phase-modulated scanning metrology system and method

Illumination apparatus and associated metrology and lithographic apparatuses

Metrology method and associated metrology and lithographic apparatuses

High force low voltage piezoelectric micromirror actuator

Position sensor, lithographic apparatus and method for manufacturing devices

ASML HOLDING NV

Intensity order difference based metrology system, lithographic apparatus, and methods thereof