Inventor
NAM SANGKI
KR12 patents
Patents
12 patentsUS11195696B2Dec 7, 2021
Electron beam generator, plasma processing apparatus having the same and plasma processing method using the same
SAMSUNG ELECTRONICS CO LTD4 citations71
US12560532B2Feb 24, 2026
Apparatus for measuring radical density distribution based on light absorption and operating method thereof
SAMSUNG ELECTRONICS CO LTD0 citations57
US11869751B2Jan 9, 2024
Upper electrode and substrate processing apparatus including the same
SAMSUNG ELECTRONICS CO LTD0 citations57
US11545344B2Jan 3, 2023
Upper electrode and substrate processing apparatus including the same
SAMSUNG ELECTRONICS CO LTD0 citations57
US12087550B2Sep 10, 2024
Device for measuring density of plasma, plasma processing system, and semiconductor device manufacturing method using the same
SAMSUNG ELECTRONICS CO LTD0 citations53
US11705306B2Jul 18, 2023
Variable frequency and non-sinusoidal power generator using double side cooling, plasma processing apparatus including the same and method of manufacturing semiconductor device using the same
SAMSUNG ELECTRONICS CO LTD0 citations50
US11996275B2May 28, 2024
Device for radical diagnostic in plasma processing chamber, radical diagnostic system having the same, and operating method thereof
SAMSUNG ELECTRONICS CO LTD0 citations49
US12512298B2Dec 30, 2025
Plasma processing device
SAMSUNG ELECTRONICS CO LTD0 citations48
US12431341B2Sep 30, 2025
Apparatus for arcing diagnosis, plasma process equipment including the same, and arcing diagnosis method
SAMSUNG ELECTRONICS CO LTD0 citations44
US12125687B2Oct 22, 2024
System of semiconductor process and control method thereof
SAMSUNG ELECTRONICS CO LTD0 citations44
US12183555B2Dec 31, 2024
Substrate processing apparatus and method of manufacturing semiconductor device using the same
SAMSUNG ELECTRONICS CO LTD0 citations43
US11940620B2Mar 26, 2024
Method of cleaning collector of EUV light source system
SAMSUNG ELECTRONICS CO LTD0 citations43