Inventor
EARMME TAEMIN
KR15 patents
⚠️ This page may combine multiple inventors who share the name “EARMME TAEMIN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SAMSUNG ELECTRONICS CO LTD
12 patentsUS11027394B2Jun 8, 2021
Load cup and chemical mechanical polishing apparatus and method of manufacturing including the same
SAMSUNG ELECTRONICS CO LTD2 citations68
US11964357B2Apr 23, 2024
Conditioner, chemical mechanical polishing apparatus including the same and method of manufacturing a semiconductor device using the apparatus
SAMSUNG ELECTRONICS CO LTD0 citations60
US11471996B2Oct 18, 2022
Conditioner, chemical mechanical polishing apparatus including the same and method of manufacturing a semiconductor device using the apparatus
SAMSUNG ELECTRONICS CO LTD0 citations60
US12068140B2Aug 20, 2024
Method and system for monitoring substrate processing apparatus
SAMSUNG ELECTRONICS CO LTD0 citations59
US11590628B2Feb 28, 2023
Rotary body module and chemical mechanical polishing apparatus having the same
SAMSUNG ELECTRONICS CO LTD0 citations59
US12224214B2Feb 11, 2025
Method of fabricating a semiconductor device
SAMSUNG ELECTRONICS CO LTD0 citations58
US11955387B2Apr 9, 2024
Method of fabricating a semiconductor device
SAMSUNG ELECTRONICS CO LTD1 citations58
US11605551B2Mar 14, 2023
Chuck assembly, semiconductor device fabricating apparatus including the same, and method of fabricating semiconductor device
SAMSUNG ELECTRONICS CO LTD0 citations51
US12512298B2Dec 30, 2025
Plasma processing device
SAMSUNG ELECTRONICS CO LTD0 citations48
US11984297B2May 14, 2024
Plasma control device and plasma processing system
SAMSUNG ELECTRONICS CO LTD0 citations48
US11929239B2Mar 12, 2024
Plasma processing apparatus and semiconductor device manufacturing method using the same
SAMSUNG ELECTRONICS CO LTD0 citations47
US12315703B2May 27, 2025
Plasma processing apparatus and methods of manufacturing semiconductor device using the same
SAMSUNG ELECTRONICS CO LTD0 citations46