Inventor
JOHANNSMEIER KARL-HEINZ
US14 patents
⚠️ This page may combine multiple inventors who share the name “JOHANNSMEIER KARL-HEINZ”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
KASPER INSTRUMENTS
6 patentsUS4070117AJan 24, 1978
Apparatus for the automatic alignment of two superimposed objects, e.g. a semiconductor wafer and mask
KASPER INSTRUMENTS46 citations91
US3955072AMay 4, 1976
Apparatus for the automatic alignment of two superimposed objects for example a semiconductor wafer and a transparent mask
KASPER INSTRUMENTS45 citations91
US4040736AAug 9, 1977
Step-and-repeat projection alignment and exposure system
KASPER INSTRUMENTS27 citations81
US3940211AFeb 24, 1976
Step-and-repeat projection alignment and exposure system
KASPER INSTRUMENTS16 citations73
US4408885AOct 11, 1983
Apparatus for the automatic alignment of two superimposed objects, e.g. a semiconductor wafer and mask
KASPER INSTRUMENTS12 citations72
US4259019AMar 31, 1981
Apparatus for the automatic alignment of two superimposed objects, for example a semiconductor wafer and a transparent mask
KASPER INSTRUMENTS10 citations72
OPTIMETRIX CORP
5 patentsUS4452526AJun 5, 1984
Step-and-repeat projection alignment and exposure system with auxiliary optical unit
OPTIMETRIX CORP29 citations92
US4414749ANov 15, 1983
Alignment and exposure system with an indicium of an axis of motion of the system
OPTIMETRIX CORP35 citations92
US4597664AJul 1, 1986
Step-and-repeat projection alignment and exposure system with auxiliary optical unit
OPTIMETRIX CORP9 citations73
US4443096AApr 17, 1984
On machine reticle inspection device
OPTIMETRIX CORP11 citations73
US4425537AJan 10, 1984
X-Y Addressable workpiece positioner and mask aligner using same
OPTIMETRIX CORP16 citations73