Inventor

HSU PEI-CHENG

TW86 patents

⚠️ This page may combine multiple inventors who share the name “HSU PEI-CHENG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

TAIWAN SEMICONDUCTOR MFG CO LTD

45 patents

US11243461B2Feb 8, 2022

Reflective mask and fabricating method thereof

TAIWAN SEMICONDUCTOR MFG CO LTD5 citations84

US11143952B2Oct 12, 2021

Pellicle removal method

TAIWAN SEMICONDUCTOR MFG CO LTD5 citations84

US10001701B1Jun 19, 2018

Pellicle structures and methods of fabricating thereof

TAIWAN SEMICONDUCTOR MFG CO LTD7 citations83

US12153339B2Nov 26, 2024

Network type pellicle membrane and method for forming the same

TAIWAN SEMICONDUCTOR MFG CO LTD4 citations75

US12181797B2Dec 31, 2024

Extreme ultraviolet mask with alloy based absorbers

TAIWAN SEMICONDUCTOR MFG CO LTD2 citations73

US12050399B2Jul 30, 2024

Pellicle assembly and method of making same

TAIWAN SEMICONDUCTOR MFG CO LTD2 citations73

US12013632B2Jun 18, 2024

Pellicle having vent hole

TAIWAN SEMICONDUCTOR MFG CO LTD2 citations73

US11561464B2Jan 24, 2023

EUV masks to prevent carbon contamination

TAIWAN SEMICONDUCTOR MFG CO LTD1 citations73

US11506971B2Nov 22, 2022

Pellicle and method of using the same

TAIWAN SEMICONDUCTOR MFG CO LTD1 citations73

US11237477B2Feb 1, 2022

Reticle container

TAIWAN SEMICONDUCTOR MFG CO LTD3 citations73

US11106126B2Aug 31, 2021

Method of manufacturing EUV photo masks

TAIWAN SEMICONDUCTOR MFG CO LTD3 citations73

US10670959B2Jun 2, 2020

Pellicle and method of using the same

TAIWAN SEMICONDUCTOR MFG CO LTD2 citations73

US10036951B2Jul 31, 2018

Pellicle assembly and fabrication methods thereof

TAIWAN SEMICONDUCTOR MFG CO LTD3 citations73

US11385538B2Jul 12, 2022

Cleaning method for photo masks and apparatus therefor

TAIWAN SEMICONDUCTOR MFG CO LTD3 citations72

US11360384B2Jun 14, 2022

Method of fabricating and servicing a photomask

TAIWAN SEMICONDUCTOR MFG CO LTD4 citations72

US11204545B2Dec 21, 2021

EUV photo masks and manufacturing method thereof

TAIWAN SEMICONDUCTOR MFG CO LTD2 citations72

US11029593B2Jun 8, 2021

Lithography mask with a black border regions and method of fabricating the same

TAIWAN SEMICONDUCTOR MFG CO LTD2 citations71

US10866504B2Dec 15, 2020

Lithography mask with a black border region and method of fabricating the same

TAIWAN SEMICONDUCTOR MFG CO LTD2 citations71

US9535317B2Jan 3, 2017

Treating a capping layer of a mask

TAIWAN SEMICONDUCTOR MFG CO LTD4 citations71

US11048158B2Jun 29, 2021

Method for extreme ultraviolet lithography mask treatment

TAIWAN SEMICONDUCTOR MFG CO LTD2 citations70

US12416853B2Sep 16, 2025

EUV photo masks and manufacturing method thereof

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations63

US12346019B2Jul 1, 2025

Reflective mask

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations63

US12153337B2Nov 26, 2024

Extreme ultraviolet mask with tantalum base alloy absorber

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations63

US12147154B2Nov 19, 2024

EUV photo masks and manufacturing method thereof

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations63

US12013630B2Jun 18, 2024

EUV photo masks and manufacturing method thereof

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations63

US11988953B2May 21, 2024

EUV masks to prevent carbon contamination

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations63

US11868041B2Jan 9, 2024

Pellicle and method of using the same

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations63

US11852965B2Dec 26, 2023

Extreme ultraviolet mask with tantalum base alloy absorber

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations63

US11829062B2Nov 28, 2023

EUV photo masks and manufacturing method thereof

TAIWAN SEMICONDUCTOR MFG CO LTD1 citations63

US11619875B2Apr 4, 2023

EUV photo masks and manufacturing method thereof

TAIWAN SEMICONDUCTOR MFG CO LTD1 citations63

US11506969B2Nov 22, 2022

EUV photo masks and manufacturing method thereof

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations63

US11221554B2Jan 11, 2022

EUV masks to prevent carbon contamination

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations63

US12517423B2Jan 6, 2026

Extreme ultraviolet mask with alloy based absorbers

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62

US12487519B2Dec 2, 2025

Reticle container

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62

US12346021B2Jul 1, 2025

Simultaneous carbon nanotube growth, catalyst removal, boron nitride nanotube shell formation method for EUV pellicles

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62

US12346023B2Jul 1, 2025

Optical assembly with coating and methods of use

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62

US12346020B2Jul 1, 2025

Optical assembly with coating and methods of use

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62

US12346027B2Jul 1, 2025

Methods of making a semiconductor device

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62

US12339579B2Jun 24, 2025

Method of critical dimension control by oxygen and nitrogen plasma treatment in EUV mask

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62

US12265322B2Apr 1, 2025

EUV mask blank and method of making EUV mask blank

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62

US12259649B2Mar 25, 2025

Cleaning method for photo masks and apparatus therefor

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62

US12169357B2Dec 17, 2024

Method of fabricating and servicing a photomask

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62

US12085843B2Sep 10, 2024

Method of manufacturing EUV photo masks

TAIWAN SEMICONDUCTOR MFG CO LTD1 citations62

US12044960B2Jul 23, 2024

EUV photo masks and manufacturing method thereof

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62

US12038684B2Jul 16, 2024

Reflective mask and fabricating method thereof

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62

TAIWAN SEMICONDUCTOR MFG

2 patents

US9213232B2Dec 15, 2015

Reflective mask and method of making same

TAIWAN SEMICONDUCTOR MFG5 citations84

US9244341B2Jan 26, 2016

Photomask and method for forming the same

TAIWAN SEMICONDUCTOR MFG4 citations73

HSU PEI-CHENG

1 patent

US8877409B2Nov 4, 2014

Reflective mask and method of making same

HSU PEI-CHENG324 citations97

LEE HSIN-CHANG

1 patent

US8679707B2Mar 25, 2014

Method of fabricating a lithography mask

LEE HSIN-CHANG86 citations97

YEJEN APPLIANCES SHENZHEN LTD

1 patent

US9138120B2Sep 22, 2015

Automatic floor cleaner

YEJEN APPLIANCES SHENZHEN LTD7 citations82

Showing the top 50 of 86 patents by PatentIndex Score.