P

Inventor

MATTSON BRAD S

US13 patents
⚠️ This page may combine multiple inventors who share the name “MATTSON BRAD S”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

MATTSON TECH INC

10 patents
US6551447B1Apr 22, 2003

Inductive plasma reactor

MATTSON TECH INC113 citations98
US6172337B1Jan 9, 2001

System and method for thermal processing of a semiconductor substrate

MATTSON TECH INC190 citations98
US6143129ANov 7, 2000

Inductive plasma reactor

MATTSON TECH INC374 citations98
US5811022ASep 22, 1998

Inductive plasma reactor

MATTSON TECH INC282 citations98
US6342691B1Jan 29, 2002

Apparatus and method for thermal processing of semiconductor substrates

MATTSON TECH INC111 citations97
US6403925B1Jun 11, 2002

System and method for thermal processing of a semiconductor substrate

MATTSON TECH INC47 citations95
US6046439AApr 4, 2000

System and method for thermal processing of a semiconductor substrate

MATTSON TECH INC49 citations95
US6002109ADec 14, 1999

System and method for thermal processing of a semiconductor substrate

MATTSON TECH INC80 citations95
US6399921B1Jun 4, 2002

System and method for thermal processing of a semiconductor substrate

MATTSON TECH INC20 citations92
US6043460AMar 28, 2000

System and method for thermal processing of a semiconductor substrate

MATTSON TECH INC19 citations92

SANDIA CORP

2 patents
US6355909B1Mar 12, 2002

Method and apparatus for thermal processing of semiconductor substrates

SANDIA CORP43 citations95
US6133550AOct 17, 2000

Method and apparatus for thermal processing of semiconductor substrates

SANDIA CORP44 citations95

MATTSON BRAD S

1 patent
US5198634AMar 30, 1993

Plasma contamination removal process

MATTSON BRAD S85 citations91