Inventor
BARTHA JOHANN
DE9 patents
Patents
9 patentsUS5635337AJun 3, 1997
Method for producing a multi-step structure in a substrate
IBM44 citations93
US6061074AMay 9, 2000
Ion generator for ionographic print heads
IBM22 citations91
US5658472AAug 19, 1997
Method for producing deep vertical structures in silicon substrates
IBM46 citations91
US5296091AMar 22, 1994
Method of etching substrates having a low thermal conductivity
IBM17 citations80
US5717278AFeb 10, 1998
Field emission device and method for fabricating it
IBM14 citations71
US5304278AApr 19, 1994
Apparatus for plasma or reactive ion etching and method of etching substrates having a low thermal conductivity
IBM8 citations71
US5641610AJun 24, 1997
Method for producing a multi-step structure in a substrate
IBM8 citations70
US5707537AJan 13, 1998
Bulk removal, transport and storage fixture for small batch-fabricated devices
IBM5 citations61
US5791959AAug 11, 1998
Method of fabricating a field emission device
IBM2 citations60