P

Inventor

MIKATA YUICHI

JP8 patents
⚠️ This page may combine multiple inventors who share the name “MIKATA YUICHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

TOSHIBA KK

5 patents
US5252133AOct 12, 1993

Vertically oriented CVD apparatus including gas inlet tube having gas injection holes

TOSHIBA KK313 citations98
US6188838B1Feb 13, 2001

Apparatus for heat treating a semiconductor wafer to reduce stress

TOSHIBA KK29 citations92
US5893760AApr 13, 1999

Method of heat treating a semiconductor wafer to reduce stress

TOSHIBA KK36 citations92
US6211081B1Apr 3, 2001

Method of manufacturing a semiconductor device in a CVD reactive chamber

TOSHIBA KK32 citations91
US6383897B2May 7, 2002

Apparatus for manufacturing a semiconductor device in a CVD reactive chamber

TOSHIBA KK10 citations72

TOKYO ELECTRON LTD

2 patents
US5484484AJan 16, 1996

Thermal processing method and apparatus therefor

TOKYO ELECTRON LTD513 citations98
US5750436AMay 12, 1998

Thermal processing method and apparatus therefor

TOKYO ELECTRON LTD61 citations96

ROHM CO LTD

1 patent
US7344805B2Mar 18, 2008

Mask and method for producing thereof and a semiconductor device using the same

ROHM CO LTD3 citations62