Inventor
BRENNER MICHAEL F
US5 patents
Patents
5 patentsUS6753037B2Jun 22, 2004
Re-coating MEMS devices using dissolved resins
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US7071025B2Jul 4, 2006
Separating wafers coated with plastic films
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Method to reduce particulates in device manufacture
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US7166546B2Jan 23, 2007
Planarization for integrated circuits
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US7060633B2Jun 13, 2006
Planarization for integrated circuits
TEXAS INSTRUMENTS INC1 citations48