Inventor
USHIKOSHI RYUSUKE
JP26 patents
⚠️ This page may combine multiple inventors who share the name “USHIKOSHI RYUSUKE”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
NGK INSULATORS LTD
24 patentsUS5231690AJul 27, 1993
Wafer heaters for use in semiconductor-producing apparatus and heating units using such wafer heaters
NGK INSULATORS LTD320 citations99
US6057513AMay 2, 2000
Joint structure of metal member and ceramic member and method of producing the same
NGK INSULATORS LTD92 citations98
US5800618ASep 1, 1998
Plasma-generating electrode device, an electrode-embedded article, and a method of manufacturing thereof
NGK INSULATORS LTD108 citations98
US5306895AApr 26, 1994
Corrosion-resistant member for chemical apparatus using halogen series corrosive gas
NGK INSULATORS LTD157 citations98
US5280156AJan 18, 1994
Wafer heating apparatus and with ceramic substrate and dielectric layer having electrostatic chucking means
NGK INSULATORS LTD406 citations98
US6134096AOct 17, 2000
Electrostatic chuck
NGK INSULATORS LTD78 citations96
US5946183AAug 31, 1999
Electrostatic chuck
NGK INSULATORS LTD50 citations96
US5616024AApr 1, 1997
Apparatuses for heating semiconductor wafers, ceramic heaters and a process for manufacturing the same, a process for manufacturing ceramic articles
NGK INSULATORS LTD99 citations96
US5490228AFeb 6, 1996
Heating units for use in semiconductor-producing apparatuses and production thereof
NGK INSULATORS LTD44 citations96
US5215501AJun 1, 1993
Hysteresis magnet coupling for roots type pumps
NGK INSULATORS LTD65 citations96
US6101969AAug 15, 2000
Plasma-generating electrode device, an electrode-embedded article, and a method of manufacturing thereof
NGK INSULATORS LTD48 citations95
US5683606ANov 4, 1997
Ceramic heaters and heating devices using such ceramic heaters
NGK INSULATORS LTD60 citations94
US6617514B1Sep 9, 2003
Ceramics joint structure and method of producing the same
NGK INSULATORS LTD36 citations92
US6225606B1May 1, 2001
Ceramic heater
NGK INSULATORS LTD31 citations92
US6197246B1Mar 6, 2001
Plasma-generating electrode device, an electrode-embedded article, and a method of manufacturing thereof
NGK INSULATORS LTD19 citations92
US6106960AAug 22, 2000
Joined articles, corrosion-resistant joining materials and process for producing joined articles
NGK INSULATORS LTD46 citations92
US6020076AFeb 1, 2000
Joined ceramic structures and a process for the production thereof
NGK INSULATORS LTD27 citations92
US5995357ANov 30, 1999
Ceramic member-electric power supply connector coupling structure
NGK INSULATORS LTD23 citations92
US5794838AAug 18, 1998
Ceramics joined body and method of joining ceramics
NGK INSULATORS LTD46 citations92
US5767027AJun 16, 1998
Aluminum nitride sintered body and its production method
NGK INSULATORS LTD24 citations92
US5573690ANov 12, 1996
Ceramic articles
NGK INSULATORS LTD36 citations92
US6252758B1Jun 26, 2001
Method for reducing particles from an electrostatic chuck and an equipment for manufacturing a semiconductor
NGK INSULATORS LTD23 citations91
US4762461AAug 9, 1988
Leakless pump
NGK INSULATORS LTD14 citations74
US6975497B2Dec 13, 2005
Method for reducing particles from an electrostatic chuck and an equipment for manufacturing a semiconductor
NGK INSULATORS LTD9 citations72