P

Inventor

JINBO HIROKI

JP32 patents
⚠️ This page may combine multiple inventors who share the name “JINBO HIROKI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

NIKON CORP

31 patents
US6649268B1Nov 18, 2003

Optical member made of silica glass, method for manufacturing silica glass, and reduction projection exposure apparatus using the optical member

NIKON CORP25 citations92
US6291377B1Sep 18, 2001

Silica glass and its manufacturing method

NIKON CORP25 citations92
US6174830B1Jan 16, 2001

Silica glass having superior durability against excimer laser beams and method for manufacturing the same

NIKON CORP16 citations92
US6087283AJul 11, 2000

Silica glass for photolithography

NIKON CORP39 citations92
US6061174AMay 9, 2000

Image-focusing optical system for ultraviolet laser

NIKON CORP32 citations92
US5958809ASep 28, 1999

Fluorine-containing silica glass

NIKON CORP47 citations92
US5702495ADec 30, 1997

Silica glass member for UV-lithography, method for silica glass production, and method for silica glass member production

NIKON CORP29 citations92
US5699183ADec 16, 1997

Silica glass member for UV-lithography, method for silica glass production, and method for silica glass member production

NIKON CORP25 citations92
US5696624ADec 9, 1997

Silica glass member for UV-lithography, method for silica glass production, and method for silica glass member production

NIKON CORP24 citations92
US5776219AJul 7, 1998

Method of making a piece of glass for measuring transmittance

NIKON CORP22 citations91
US6094940AAug 1, 2000

Manufacturing method of synthetic silica glass

NIKON CORP23 citations89
US6505484B1Jan 14, 2003

Forming method of silica glass and forming apparatus thereof

NIKON CORP16 citations84
US6018964AFeb 1, 2000

Method for manufacturing quartz glass

NIKON CORP17 citations82
US5703712ADec 30, 1997

Silica glass member for UV-lithography, method for silica glass production, and method for silica glass member production

NIKON CORP11 citations82
US6587262B1Jul 1, 2003

UV synthetic silica glass optical member and reduction projection exposure apparatus using the same

NIKON CORP7 citations74
US6587181B2Jul 1, 2003

Optical system with improved durability for projection exposure apparatus and method for manufacturing optical system for projection exposure apparatus

NIKON CORP8 citations74
US6518210B1Feb 11, 2003

Exposure apparatus including silica glass and method for producing silica glass

NIKON CORP10 citations74
US6473226B1Oct 29, 2002

Silica glass member

NIKON CORP13 citations74
US6374639B2Apr 23, 2002

Silica glass and its manufacturing method

NIKON CORP10 citations74
US6373554B1Apr 16, 2002

Optical system with improved durability for projection exposure apparatus and method for manufacturing optical system for projection exposure apparatus

NIKON CORP5 citations74
US6075607AJun 13, 2000

Method for estimating durability of optical member against excimer laser irradiation and method for selecting silica glass optical member

NIKON CORP13 citations74
US6656860B2Dec 2, 2003

Synthetic silica glass member, photolithography apparatus and process for producing photolithography apparatus

NIKON CORP7 citations73
US6339033B2Jan 15, 2002

Silica glass having superior durability against excimer laser beams and method for manufacturing the same

NIKON CORP9 citations73
US6320661B1Nov 20, 2001

Method for measuring transmittance of optical members for ultraviolent use, synthetic silica glass, and photolithography apparatus using the same

NIKON CORP11 citations73
US6044664AApr 4, 2000

Synthetic silica glass manufacturing apparatus

NIKON CORP13 citations72
US6269661B1Aug 7, 2001

Method for manufacturing optical components for use in the ultraviolet region

NIKON CORP5 citations71
US5983672ANov 16, 1999

Method for manufacturing optical components for use in the ultraviolet region

NIKON CORP12 citations71
US6442973B1Sep 3, 2002

Synthetic silica glass and its manufacturing method

NIKON CORP6 citations62
US6129987AOct 10, 2000

Method of making a piece of glass for measuring transmittance

NIKON CORP2 citations61
US6835683B2Dec 28, 2004

Quartz glass member and projection aligner

NIKON CORP0 citations52
US6378340B2Apr 30, 2002

Manufacturing method of synthetic silica glass

NIKON CORP1 citations52

HITACHI LTD

1 patent