Inventor

FAIR JAMES A

US21 patents

⚠️ This page may combine multiple inventors who share the name “FAIR JAMES A”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

FAIR JAMES A

NOVELLUS SYSTEMS INC

Thin layer metal chemical vapor deposition

Copper atomic layer chemical vapor desposition

Sequential UV induced chemical vapor deposition

ALD of tantalum using a hydride reducing agent

Deposition of tungsten nitride

Selective refractory metal and nitride capping

Sequential electron induced chemical vapor deposition

Deposition of tungsten nitride

Sequential ion, UV, and electron induced chemical vapor deposition

Selective refractory metal and nitride capping

Methods of forming tungsten nucleation layer

Method for preventing and cleaning ruthenium-containing deposits in a CVD apparatus

Thin layer metal chemical vapor deposition

Adhesion promotion for etch by-products

ADVANCED TECH MATERIALS

Interiorly partitioned vapor injector for delivery of source reagent vapor mixtures for chemical vapor deposition

Method of delivering source reagent vapor mixtures for chemical vapor deposition using interiorly partitioned injector

GENUS INC

Method and apparatus for deposition of tungsten silicides

Method and apparatus for deposition of tungsten silicides

VARIAN ASSOCIATES

Method of and apparatus for non-contact temperature measurement

Method and structure for reducing short circuits between overlapping conductors

FAIR JAMES A

Plasma generator apparatus