Inventor
JERDE LESLIE G
US16 patents
⚠️ This page may combine multiple inventors who share the name “JERDE LESLIE G”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TEGAL CORP
13 patentsUS6354240B1Mar 12, 2002
Plasma etch reactor having a plurality of magnets
TEGAL CORP57 citations95
US6620335B1Sep 16, 2003
Plasma etch reactor and method
TEGAL CORP23 citations92
US6391148B2May 21, 2002
Cobalt silicide etch process and apparatus
TEGAL CORP21 citations92
US6346428B1Feb 12, 2002
Method and apparatus for minimizing semiconductor wafer arcing during semiconductor wafer processing
TEGAL CORP17 citations92
US6287975B1Sep 11, 2001
Method for using a hard mask for critical dimension growth containment
TEGAL CORP21 citations92
US6500314B1Dec 31, 2002
Plasma etch reactor and method
TEGAL CORP11 citations81
US6046116AApr 4, 2000
Method for minimizing the critical dimension growth of a feature on a semiconductor wafer
TEGAL CORP15 citations78
US6958295B1Oct 25, 2005
Method for using a hard mask for critical dimension growth containment
TEGAL CORP5 citations73
US6905969B2Jun 14, 2005
Plasma etch reactor and method
TEGAL CORP7 citations73
US6486069B1Nov 26, 2002
Cobalt silicide etch process and apparatus
TEGAL CORP6 citations73
US6406925B1Jun 18, 2002
Method and apparatus for minimizing semiconductor wafer arcing during semiconductor wafer processing
TEGAL CORP9 citations73
US6774046B2Aug 10, 2004
Method for minimizing the critical dimension growth of a feature on a semiconductor wafer
TEGAL CORP6 citations72
US7223699B2May 29, 2007
Plasma etch reactor and method
TEGAL CORP3 citations62